High sensitivity micro-displacement homodyne interferometry

Interferometry is widely used in nano-scale micro-topography measurement. In order to improve its accuracy and sensitivity, a high-sensitivity homodyne interferometry based on white light interference and laser secondary interference was proposed. A high-sensitivity homodyne interferometry system was designed, and the zero point of the laser secondary interference was used to locate the dark striation of white light interference, so that it could reach the maximum slope when optical path difference was zero. The signals of white light and laser were analyzed by using the wave principle and intensity formula of interference fringes, and a sensitivity calculation method based on the combination of white light and laser interference signal was proposed. The system and its sensitivity were simulated. Finally, the optical path was built, and the white light interference fringes were adjusted to the dark striations position, so as to locate the zero position of laser secondary interference and carry out the data acquisition. It is showed that the sensitivity of the measurement method is at least 1 832 times higher than that of the laser secondary interference, and the corresponding measurement uncertainty is only ±0.288 7 mV. The measurement system can effectively solve the problem of large amount of calculation in traditional interferometry, and has high sensitivity, stability and reliability.