Research on preparation method of mold of diffractive optical element based on computer generated holography

WU Yaoxia; ZHANG Jin; SUN Guobin; JIANG Shilei; MI Qian; LI Shijie; YANG Pengfei; WANG Yujin

doi:10.5768/JAO201940.0301008

Volume 40 Issue 3

May 2019

Turn off MathJax

Article Contents

Article Navigation > Journal of Applied Optics > 2019 > 40(3): 404-410

WU Yaoxia, ZHANG Jin, SUN Guobin, JIANG Shilei, MI Qian, LI Shijie, YANG Pengfei, WANG Yujin. Research on preparation method of mold of diffractive optical element based on computer generated holography[J]. Journal of Applied Optics, 2019, 40(3): 404-410. doi: 10.5768/JAO201940.0301008

Citation:

WU Yaoxia, ZHANG Jin, SUN Guobin, JIANG Shilei, MI Qian, LI Shijie, YANG Pengfei, WANG Yujin. Research on preparation method of mold of diffractive optical element based on computer generated holography[J]. Journal of Applied Optics, 2019, 40(3): 404-410. doi: 10.5768/JAO201940.0301008

Citation:

WU Yaoxia, ZHANG Jin, SUN Guobin, JIANG Shilei, MI Qian, LI Shijie, YANG Pengfei, WANG Yujin. Research on preparation method of mold of diffractive optical element based on computer generated holography[J]. Journal of Applied Optics, 2019, 40(3): 404-410. doi: 10.5768/JAO201940.0301008

PDF( 1494 KB)

Research on preparation method of mold of diffractive optical element based on computer generated holography

doi: 10.5768/JAO201940.0301008

School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710032, China

Received Date: 2018-09-03
Rev Recd Date: 2018-11-15
Publish Date: 2019-05-01

Abstract

Abstract

The preparation method of mold based on computer generated holography(CGH) of asymmetric multi-step diffractive optical element was introduced, the working principle and design method of phase-type CGH were studied, the corresponding optical system and the diffracted light wave model were established and the algorithm flow chart for obtaining phase-type mold microstructure was designed. Taking a folded heart pattern as an example, the phase information and surface microstructure morphology of 2-step, 4-step, 8-step and 16-step diffractive optical element were simulated by MATLAB, and the quality of the reconstructed image was compared on the basis of theoretical analysis. It is found that the more the number of steps is, the better the quality of the reproduced images will be. After obtaining the height data of the die space and the distribution of the surface structure, the 2-step and 4-step molds with the 6 mm×6 mm element size and the smallest characteristic size 30 um were respectively obtained by the fast knife processing method and the single-point diamond turning technology, and the step contour curve and surface structure contour of actual processing were obtained. Finally, the ultraviolet(UV)-curing nanoimprint technology was used to realize the replication process of the 4-step mold, and the image of replicated samples were produced. The results show that the method can be used for the mold preparation of asymmetric low-step diffractive optical elements.
- CGH,
- diffractive micro-optical components,
- mold microstructure,
- reproduction of images

FullText(HTML)

References(18)

References

颜树华.衍射微光学设计[M].北京:国防工业出版社, 2011.

YAN Shuhua. Design of diffractive micro-optics[M]. Beijing: National Defense Industry Press, 2011.

周海宪, 程云芳.全息光学——设计、制造和应用[M].北京:化学工业出版社, 2006:191-193. https://www.ixueshu.com/document/df587df9d5dafac73693c57b2a02843e318947a18e7f9386.html

ZHOU Haixian, CHENG Yunfang. Holographic optics-design, manufacture and application[M]. Beijing: Chemical Industry Press, 2006:191-193. https://www.ixueshu.com/document/df587df9d5dafac73693c57b2a02843e318947a18e7f9386.html

郑国兴, 吕良宇, 李松, 等.基于超表面材料的光波相位精密操控新技术[J].应用光学, 2017, 38(02):153-158. doi: 10.5768/JAO201738.0201001

ZHENG Guoxing, LV Liangyu, LI Song, et al. A new technology of light wave phase precision manipulation based on supersurface materials[J]. Journal of Applied Optics, 2017, 38(02):153-158. doi: 10.5768/JAO201738.0201001

LI Y Z, ABOOKASIS D, ROSEN J. Computer-generated holograms of three-dimensional realistic objects recorded without wave interference[J]. Applied Optics, 2001, 40(17): 2864. doi: 10.1364/AO.40.002864

BAI X H, LIN W, REN Y P, et al. Reflection holography for three-dimensional display based on computer-generated holography[J]. Acta Photonica Sinica, 2012, 41(5):591-595. doi: 10.3788/gzxb20124105.0591

陈林, 许忠保, 邬文俊, 等.基于博奇编码离轴全息方法的研究[J].应用光学, 2014, 35(6):1003-1008. http://yygx.xml-journal.net/article/id/10524

CHEN Lin, XU Zhongbao, WU Wenjun, et al. Research on off-axis holographic method based on bodge coding[J]. Journal of Applied Optics, 2014, 35(6): 1003-1008. http://yygx.xml-journal.net/article/id/10524

王海祥.纳米压印镍模板的复制工艺研究[D].大连: 大连理工大学, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10141-1013199552.htm

WANG Haixiang. Research on the replication process of nickel nano-imprint stamp[D]. Dalian: Dalian University of Technology, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10141-1013199552.htm

HONG S H, LEE J H, LEE H. Fabrication of 50nm patterned nickel stamp with hot embossing and electroforming process[J]. Microelectronic Engineering, 2007, 84(5/6/7/8): 977-979. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=b3eb2156c6310522b3707beb8a4e2f0b

刘鑫, 张满, 庞辉, 等.基于纳米压印的大角度衍射光学元件批量化制备方法[J].光子学报, 2016, 45(6): 102-106. http://d.old.wanfangdata.com.cn/Periodical/gzxb201606017

LIU Xin, ZHANG Man, PANG Hui, et al. Fabrication of large-angle diffractive optical element based on nanoimprint lithography[J]. Acta Photonica Sinica, 2016, 45(6): 102-106. http://d.old.wanfangdata.com.cn/Periodical/gzxb201606017

罗军.基于紫外压印的二元光学器件制备方法研究[D].哈尔滨: 哈尔滨工业大学, 2015. http://cdmd.cnki.com.cn/Article/CDMD-10213-1015980109.htm

LUO Jun. Research on fabrication of binary optics elements based on uv-nil[D]. Harbin: Harbin Institute of Technology, 2015. http://cdmd.cnki.com.cn/Article/CDMD-10213-1015980109.htm

郭慧晶.基于普通光盘与软模板纳米压印技术的二维微纳结构的制备[D].太原: 太原理工大学, 2016. http://cdmd.cnki.com.cn/Article/CDMD-10112-1016714592.htm

GUO Huijing. Fabrication of two-dimensions micro-and nano-structures based on optical disc and nanoimprint using soft template[D]. Taiyuan: Taiyuan University of Technology, 2016. http://cdmd.cnki.com.cn/Article/CDMD-10112-1016714592.htm

SÖDERSTRÖM K, ESCARRÉ J, CUBERO O, et al. UV-nano-imprint lithography technique for the replication of back reflectors for n-i-p thin film silicon solar cells[J]. Progress in Photovoltaics: Research and Applications, 2011, 19(2): 202-210. doi: 10.1002/pip.1003

MEIER M, PAETZOLD U W, PRÖMPERS M, et al. UV nanoimprint for the replication of etched ZnO: Al textures applied in thin-film silicon solar cells[J]. Progress in Photovoltaics: Research and Applications, 2013, 22(12): 2382.

虞祖良, 金国藩.计算机制全息图[M].北京:清华大学出版社, 1984.

YU Zuliang, JIN Guofan. Computer generated hologram[M]. Beijing: Tsinghua University press, 1984.

楼木.基于MATLAB的3D全息及计算全息图的编码和再现研究[D].南昌: 南昌大学, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10403-1013343330.htm

LOU Mu. Research on three-dimensional holography and computer generated hologram's encoding and reproduction based on MATLAB[D]. Nanchang: Nanchang University, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10403-1013343330.htm

张梦妮, 张锦, 蒋世磊, 等.用于智能显示的相位型计算全息图的设计[J].液晶与显示, 2018, 33(3): 245-253. http://d.old.wanfangdata.com.cn/Periodical/yjyxs201803011

ZHANG Mengni, ZHANG Jin, JIANG Shilei, et al. Design of phase type computer-generated-hologram for intelligent display[J]. Chinese Journal of Liquid Crystals and Displays, 2018, 33(3): 245-253. http://d.old.wanfangdata.com.cn/Periodical/yjyxs201803011

张满.基于纳米压印技术的微纳结构制备与应用研究[D].北京: 中国科学院研究生院(光电技术研究所), 2016. http://cdmd.cnki.com.cn/Article/CDMD-80151-1016757878.htm

ZHANG Man. Fabrication and application of micro/nano-structure based on nanoimprint lithography[D]. Graduate School of Chinese Academy of Sciences (Institute of Photoelectric Technology), 2016. http://cdmd.cnki.com.cn/Article/CDMD-80151-1016757878.htm

Relative Articles

Supplements(0)

Cited By

Proportional views