Error analysis and correction of circular grating angle measurement system

ZHANG Wenying; ZHU Haoran

doi:10.5768/JAO201940.0301007

Volume 40 Issue 3

May 2019

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Article Navigation > Journal of Applied Optics > 2019 > 40(3): 399-403

ZHANG Wenying, ZHU Haoran. Error analysis and correction of circular grating angle measurement system[J]. Journal of Applied Optics, 2019, 40(3): 399-403. doi: 10.5768/JAO201940.0301007

Citation:

ZHANG Wenying, ZHU Haoran. Error analysis and correction of circular grating angle measurement system[J]. Journal of Applied Optics, 2019, 40(3): 399-403. doi: 10.5768/JAO201940.0301007

ZHANG Wenying, ZHU Haoran. Error analysis and correction of circular grating angle measurement system[J]. Journal of Applied Optics, 2019, 40(3): 399-403. doi: 10.5768/JAO201940.0301007

Citation:

ZHANG Wenying, ZHU Haoran. Error analysis and correction of circular grating angle measurement system[J]. Journal of Applied Optics, 2019, 40(3): 399-403. doi: 10.5768/JAO201940.0301007

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Error analysis and correction of circular grating angle measurement system

doi: 10.5768/JAO201940.0301007

ZHANG Wenying^{1, 2
,},
ZHU Haoran³

1.
Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun 130052, China
2.
Jilin Engineering Laboratory for Quantum Information Technology, Changchun 130052, China
3.
School of Electronics and Information Engineering, Changchun University of Science and Technology, Changchun 130022, China

Received Date: 2018-12-03
Rev Recd Date: 2018-12-27
Publish Date: 2019-05-01

Abstract

Abstract

In order to improve the measurement accuracy of the angle measuring system, based on the characteristics and form of the error, the corresponding mathematical models of the scoring error, photoelectric signal error, eccentricity error, tilt error and the error caused by the deformation in the angle measuring system were established from the harmonic angle aspect, and the eccentricity error and tilt error were analyzed. Furthermore, a metal circular grating angle measuring system was built, and the error in the system was analyzed and corrected. The experimental results show that the angle measurement error of the angle measuring system is 134.2″, and the corrected error is 32.23″. The error analysis of the circular grating angle measurement system provides a theoretical basis for the subsequent error compensation.
- circular grating,
- angle measuring system,
- eccentricity error,
- error analysis

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References(15)

References

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