Novel hybrid integration approach for fabrication of single crystal pyroelectric detector

Several possible methods for the fabrication of integrated sensors were compared and a novel hybrid integration method was developed. To realize the hybrid integration of the pyroelectric detector with the signal readout circuit (ROIC), it is proposed to use the anisotropic conductive tape as the interconnection between the sensor and the ROIC. The method showed good compatibility for the fabrication of integrated multi-sensors. Single crystal LiTaO3 (LT) was used as the pyroelectric material for demonstration purpose. The LT wafer was thinned with mechanical grinding method. 3M z-axis adhesive film 5552R was used as the anisotropic conductive film to realize the interconnection between the sensor and the ROIC. Results showed that the LT thin film had similar pyroelectric properties as those of the single crystal wafer. The integrated pyroelectric detector showed good thermal isolation characteristics and high dynamic response.