Fabrication of removable superlens and research of its characteristics

Based on the solid immersion lenses (SILs), a new super-resolution system with nanometer scale was designed by using the SU-8 photoresist and a 4.87 m diameter spherical lens. The computation process of the magnification was introduced. The focal distance was simulated by softwares in addition. By changing the thickness of the SU-8 layer from 3.4 m to 0, the system-s magnification was changed from 1.6x to 2.6x. Experiment results show that the thickness of SU-8 photoresist influences the magnification directly,the stripe patterns of the blu-ray disc can be observed in ordinary optical microscopes by using the superresolution system.