Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR

ZHANG Shan; SHEN Yiming; LIU Dan; ZHONG Yanhong; WEI Yanfeng; LIAO Qingjun; CHEN Honglei; LIN Chun; DING Ruijun; HE Li

doi:10.5768/JAO201940.0202004

Volume 40 Issue 3

May 2019

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Article Navigation > Journal of Applied Optics > 2019 > 40(3): 429-434

ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. doi: 10.5768/JAO201940.0202004

Citation:

ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. doi: 10.5768/JAO201940.0202004

Citation:

ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. doi: 10.5768/JAO201940.0202004

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Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR

doi: 10.5768/JAO201940.0202004

1.
Key Laboratory of Infrared Imaging Material and Detectors, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
2.
School of information Science and Technology, Shanghai 201210

Received Date: 2018-10-25
Rev Recd Date: 2018-11-08
Publish Date: 2019-05-01

Abstract

Abstract

To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.
- ultra-spectrum detection,
- Vis/NIR spectral imaging,
- HgCdTe,
- substrate removal,
- quantum efficiency

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References(15)

References

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