Volume 40 Issue 3
May  2019
Turn off MathJax
Article Contents
ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. doi: 10.5768/JAO201940.0202004
Citation: ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. doi: 10.5768/JAO201940.0202004

Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR

doi: 10.5768/JAO201940.0202004
  • Received Date: 2018-10-25
  • Rev Recd Date: 2018-11-08
  • Publish Date: 2019-05-01
  • To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.
  • loading
  • 张若岚, 陈洁.从单波段到超光谱——面向多维信息感知的红外光谱成像技术[J].红外技术, 2014, 36(4):257-264. http://d.old.wanfangdata.com.cn/Periodical/hwjs201404001

    ZHANG Ruolan, CHEN Jie. From single-band to ultraspectral——infrared spectral imaging technology oriented to multi-dimension information awareness[J], Infrared Technology, 2014, 36(4):257-264. http://d.old.wanfangdata.com.cn/Periodical/hwjs201404001
    GOETZ A, VANE G, Imaging spectrometry of earth remote sensing[J]. Science, 1985, 228:1147-1153. doi: 10.1126/science.228.4704.1147
    BRECKINRIDGE J B. Evolution of imaging spectrometry:past, present, and future[J]. SPIE, 1996, 2819:2-6. http://d.old.wanfangdata.com.cn/OAPaper/oai_pubmedcentral.nih.gov_3757728
    孙允珠, 蒋光伟, 李云端, 等.高光谱观测卫星及应用前景[J].上海航天, 2017, 34(3):1-13. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shht201703001

    SUN Yunzhu, JIANG Guangwei, LI Yunduan, et al. Hyper-spectral observation satellite and it's application prospect[J]. Aerospace Shanghai, 2017, 34(3):1-13. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shht201703001
    贺霖, 潘东, 邸辑, 等.高光谱图像目标检测研究进展[J].电子学报, 2009, 37(9):2016-2024. doi: 10.3321/j.issn:0372-2112.2009.09.024

    HE Lin, PAN Dong, DI Ji, et al. Research advance on target detection for hyperspectral imagery[J]. Acta Electronica Sinica, 2009, 37(9):2016-2024. doi: 10.3321/j.issn:0372-2112.2009.09.024
    熊伟.星载超光谱大气主要温室气体监测载荷[J].航天返回与遥感, 2018, 39(3):14-24. doi: 10.3969/j.issn.1009-8518.2018.03.002

    XIONG Wei. Hyperspectral greenhouse gases monitor instrument(GMI) for spaceborne payload[J]. Spacecraft Recovery & Remote Sensing, 2018, 39(3):14-24. doi: 10.3969/j.issn.1009-8518.2018.03.002
    PIQUETTEE C, EDWALLD D, ARNOLD H, et al. Substrate-removed HgCdTe-based focal-plane arrays for short-wavelength infrared astronomy[J]. Journal of Electronic Materials, 2008, 37(9):1396-1400. doi: 10.1007/s11664-008-0421-8
    ROGALSKI A. Infrared detectors:status and trends[J]. Progress in Quantum Electronics, 2004, 27:59-210. http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201212003
    高国龙.法国Sofradir公司的空间高光谱传感技术[J].红外, 2017, 38(2):46-48. doi: 10.3969/j.issn.1672-8785.2017.02.008

    GAO Guolong. Hyperspectral remote sensing technology of Sofradir Co. in France[J]. Infrared, 2017, 38(2):46-48. doi: 10.3969/j.issn.1672-8785.2017.02.008
    陈宇恒, 季轶群, 周建康, 等.机载可见-红外超光谱成像仪信噪比的估算[J].红外与激光工程, 2012, 41(9):2300-2303. doi: 10.3969/j.issn.1007-2276.2012.09.010

    CHEN Yiheng, JI Yiqun, ZHOU Jiankang, et al. Signal-to-noise ratio evaluation of airborne visible-infrared hyperspectral imaging spectrometer[J]. Infrared and Laser Engineering, 2012, 41(9):2300-2303. doi: 10.3969/j.issn.1007-2276.2012.09.010
    ASAHI T, ODA O, TANIGUCHI Y, et al. Characterization of 100mm Diameter CdZnTe single crystals grown by the vertical gradient freezing method[J]. Journal of Crystal Growth, 1995, 149(1-2):23-29. doi: 10.1016/0022-0248(94)00966-X
    NGUYEN T, LORANS D. Highlights of recent results on HgCdTe thin film photo-conductors[J].Semiconductor Science and Technology, 1991, 6:93-95. doi: 10.1088/0268-1242/6/2/004
    LO VECCHIO P, WONG K, PARODOS T, et al. Advances in liquid phase epitaxial growth of Hg1-xCdxTe for SWIR through VLWIR photodiodes[J]. SPIE, 2004, 5564:65-72. doi: 10.1117/12.566470.full
    CHANDRA D, TREGILGAS J H, GDDOWIN M W. Dislocation density variations in HgCdTe films grown by dipping liquid phase epitaxy:Effects on metal-insulator-semiconductor properties[J]. Journal of Vacuum Science Technology B, 1991, 9(3):1852-1857. doi: 10.1116/1.585811
    LU W, HE L, CHEN X S, et al. The development of HgCdTe infrared detector technology in China[J], SPIE, 2009, 7298: 72982Z-1-13.
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索
    Article views (1176) PDF downloads(33) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return