基于超薄主镜的一种离轴分体式大口径平行光管设计

    Design of off-axis split large aperture collimator based on ultra-thin main mirror

    • 摘要: 随着光电设备的快速发展,对光学检测的需求越来越多,大口径、高精度、宽视场、高稳定性平行光管逐步成为关键测试设备。提出一种超薄离轴分体式设计方法,利用超薄主镜和复用气浮平台作为光管的基座,以减轻系统的质量。针对直径为1560 mm、径厚比为14.8的超薄主镜,设计了16点柔性化竖直推拉侧支撑机构,消除装配应力和热应力的影响;设计箱式镜座和殷钢材质温度补偿机构,保证主副镜间距离满足光学要求。基于Boyes定位原理,设计“3轴杆+3切向杆”复合定位机构和“V槽滑动柱销+升降螺杆”安装机构对主镜进行精密定位。系统有限元分析表明:主镜支撑重力变形RMS(root-mean-square)为2.546 nm,主镜支撑力扰动5 N时支撑变形小于7.5 nm,主镜轴向定位误差为±0.2 mm时支撑变形小于5 nm,主镜支撑杆定位精度为0.3 mm时变形小于2.572 nm,轻量化光管系统谐振频率大于38 Hz。现场测试结果表明:光管总质量约1 800 kg,主镜光轴水平RMS为0.0195 λ,光管系统精度RMS为0.060 λ,均优于指标要求,因此提出的基于超薄主镜的离轴分体式光管设计方法合理可行,对未来平行光管的设计具有较好的参考价值。

       

      Abstract: With the rapid development of optoelectronic equipment, the demand for optical testing is increasing, and the large-aperture, high-precision, wide-field-of-view, and high-stability collimators have gradually become key test equipment. A design method for ultra-thin (primary mirror) off-axis split collimator was proposed, which used an ultra-thin primary mirror and a reused air-floating platform as the base of the collimator to reduce the mass of the system. For an ultra-thin primary mirror with a diameter of 1 560 mm and a diameter-to-thickness ratio of 14.8, a 16-point flexible vertical push-pull side support mechanism was designed to eliminate the influence of assembly stress and thermal stress, and a box-type mirror housing and an Invar temperature compensation mechanism were designed to ensure that the distance between the primary and secondary mirrors meets the optical requirements. Based on the Boyes positioning principle, a "three-axis rod + three-tangential rod" composite positioning mechanism and a "V-groove sliding pin + lifting screw" installation mechanism were designed to precisely position the primary mirror. The finite element analysis of the system shows that the RMS (root-mean-square) of gravity deformation of the primary mirror support is 2.546 nm, the support deformation is less than 7.5 nm when the primary mirror support force disturbance is 5 N, the support deformation is less than 5 nm when the primary mirror axial positioning error is ±0.2 mm, the deformation is less than 2.572 nm when the positioning accuracy of the primary mirror support rod is 0.3 mm, and the resonant frequency of the lightweight collimator is greater than 38 Hz. Field tests show that the total weight of the collimator is about 1 800 kg, the horizontal RMS of the primary mirror optical axis is 0.019 5 λ, and the accuracy RMS of the optical tube system is 0.060 λ, all of which are better than the index requirements. Therefore, the proposed off-axis split collimator design method based on the ultra-thin primary mirror is reasonable and feasible, which has a strong reference value for the design of future collimators.

       

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