岐临凯, 李克武, 李坤钰, 王志斌, 李晋华. 用于应力双折射分布测量的多构型扫描系统设计[J]. 应用光学.
引用本文: 岐临凯, 李克武, 李坤钰, 王志斌, 李晋华. 用于应力双折射分布测量的多构型扫描系统设计[J]. 应用光学.
QI Linkai, LI Kewu, LI Kunyu, WANG Zhibin, LI Jinhua. Design of multi-configuration scanning system for stress birefringence distribution measurement[J]. Journal of Applied Optics.
Citation: QI Linkai, LI Kewu, LI Kunyu, WANG Zhibin, LI Jinhua. Design of multi-configuration scanning system for stress birefringence distribution measurement[J]. Journal of Applied Optics.

用于应力双折射分布测量的多构型扫描系统设计

Design of multi-configuration scanning system for stress birefringence distribution measurement

  • 摘要: 为了实现对不同构型光学样品进行应力双折射分布测量,在使用双弹光调制方法的基础上,设计了1种应用于双折射分布测量的多构型扫描系统。该系统在保证测量的高分辨率的同时,通过保持激光器静止,同时使样品进行快速移动,提高了测量精度与广度。在样品测量方面,采用633 nm(1/4)玻片测试,测试相对误差的范围为0.79%~0.95%,波动范围为0.12 nm,标准差为0.035 2;采用BK7玻璃样品测试,波动范围为0.25 nm,标准差为0.038 9。在扫描精度方面,连续扫描精度误差不超过0.05 mm,连续寸动扫描精度误差不超过0.009 mm。对比实验结果可得出,该多构型扫描系统可有效解决对样品任一区域实现高精度应力双折射测量的问题。

     

    Abstract: In order to measure the stress birefringence distribution of optical samples with different configurations, a multiple configuration based on double elastic light modulation method scanning system was designed. The system not only ensured the high resolution of the measurement, but also improved the measurement accuracy and breadth by keeping the laser stationary and making the sample move quickly. In terms of sample measurement, using 633 nm (1/4) glass test, the relative error of the detection results was 0.79%~0.95%, with a range of 0.12 nm, the standard deviation was 0.035 2. The fluctuation range of the BK7 glass sample was 0.25 nm, and the standard deviation of the experimental results was 0.038 9. In the two-axis scanning platform step accuracy test, the continuous scanning accuracy error does not exceed 0.05 mm, and the continuous inching scanning precision error is less than 0.009 mm. According to the above two experimental results, it can be concluded that the multi-configuration scanning system can accurately scan the circular and square optical material samples.

     

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