基于弱相干干涉的镜片参数自动检测系统

    Design of an automatic lens parameter detection system based on low-coherence interferometry

    • 摘要: 本文设计了一套基于弱相干干涉的镜片参数自动检测系统。系统基于弱相干干涉测量原理,采用双波长(850 nm与470 nm)LED光源产生干涉信号。针对双波长条件下产生的柯西色散公式系数拟合欠定问题,提出一种基于群折射率差值的分段拟合方法,用于估计高阶系数,从而由群折射率精确反演相折射率及阿贝数。系统以FPGA为核心硬件平台,集成多通道采集、锁相放大、CORDIC相位解算与电机控制等功能,实现厚度、折射率与阿贝数的高精度非接触测量。该系统厚度检测误差小于±0.01 mm,折射率检测误差小于±0.005,阿贝数测量误差从行业允许的±5%控制至±2%以内。各参数变异系数均低于0.37%,满足工业现场高精度、高稳定性的在线检测需求。

       

      Abstract: An automatic lens parameter detection system based on low-coherence interferometry was designed. The system employed dual-wavelength (850 nm and 470 nm) LED light sources to generate interference signals. To address the underdetermined fitting problem of Cauchy dispersion coefficients under dual-wavelength conditions, a segmented fitting method based on group refractive index differences was proposed to estimate higher-order coefficients, thereby enabling precise inversion of phase refractive index and Abbe number from group refractive index. With an FPGA as the core hardware platform, the system integrated functions such as multi-channel data acquisition, lock-in amplification, CORDIC-based phase calculation, and motor control to achieve high-precision non-contact measurements of thickness, refractive index, and Abbe number. The measurement error of the system was less than ±0.01 mm for thickness, less than ±0.005 for refractive index, and the Abbe number measurement error was reduced from the industry-allowed ±5% to within ±2%. All coefficient of variation values were below 0.37%, demonstrating that the system meets the requirements for high-precision and high-stability online inspection in industrial applications.

       

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