基于EBAPS的光响应非均匀性测试方法研究

Study on the test method of Photoresponse non-uniformity based on EBAPS

  • 摘要: 电子轰击有源像素传感器(Electron Bombardment Active Pixel Sensor, EBAPS)的光响应非均匀性是指EBAPS中光电阴极被均匀光源照射时,不同像素输出灰度不一致的现象,尤其是在低光环境下,图像的非均匀性会使细节识别变得困难,影响后续图像处理和分析的准确性。光响应非均匀性主要由光电阴极不同区域对光响应的差异、电子敏感互补金属氧化物半导体不同区域的电子倍增特性差异、各像素间对同一激励的响应差异以及读出电路中传输信道的差异性等因素导致。本文针对EBAPS的非均匀性问题,提出了一种基于EBAPS光电阴极响应、电子倍增以及像素响应非均匀性协同适配的测试方法。实验结果表明,该方法能够有效评价EBAPS的非均匀性,能够对器件的测试筛选和算法校正起到指导作用。

     

    Abstract: The photoresponse non-uniformity of electron bombardment active pixel sensor (EBAPS) refers to the phenomenon that when the photocathode in the EBAPS device is illuminated by a uniform light source, the output grayscale of different pixels is inconsistent. Especially in low-light environments, the image non-uniformity makes it difficult to identify details, affecting the accuracy of subsequent image processing and analysis. Its generation mechanism is mainly caused by the difference in light response of different regions of the photocathode, the difference in electron multiplication characteristics of different regions of the electron-sensitive complementary metal-oxide-semiconductor (CMOS), the difference in response of each pixel to the same stimulus, and the difference in transmission channels in the readout circuit. Aiming at the non-uniformity problem in electron bombardment active pixel sensor, this paper proposes a test method based on the coordinated adaptation of EBAPS photocathode response, electron multiplication and pixel response non-uniformity. Experimental results show that this method can effectively evaluate the non-uniformity effect of EBAPS devices and can play a guiding role in device test screening and algorithm correction.

     

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