Abstract:
The photoresponse non-uniformity of electron bombardment active pixel sensor (EBAPS) refers to the phenomenon that when the photocathode in the EBAPS device is illuminated by a uniform light source, the output grayscale of different pixels is inconsistent. Especially in low-light environments, the image non-uniformity makes it difficult to identify details, affecting the accuracy of subsequent image processing and analysis. Its generation mechanism is mainly caused by the difference in light response of different regions of the photocathode, the difference in electron multiplication characteristics of different regions of the electron-sensitive complementary metal-oxide-semiconductor (CMOS), the difference in response of each pixel to the same stimulus, and the difference in transmission channels in the readout circuit. Aiming at the non-uniformity problem in electron bombardment active pixel sensor, this paper proposes a test method based on the coordinated adaptation of EBAPS photocathode response, electron multiplication and pixel response non-uniformity. Experimental results show that this method can effectively evaluate the non-uniformity effect of EBAPS devices and can play a guiding role in device test screening and algorithm correction.