张欣婷, 吴倩倩, 亢磊. 基于自准直原理的紧凑型激光位移传感器光学系统设计[J]. 应用光学, 2023, 44(4): 720-725. DOI: 10.5768/JAO202344.0401003
引用本文: 张欣婷, 吴倩倩, 亢磊. 基于自准直原理的紧凑型激光位移传感器光学系统设计[J]. 应用光学, 2023, 44(4): 720-725. DOI: 10.5768/JAO202344.0401003
ZHANG Xinting, WU Qianqian, KANG Lei. Optical system design of compact laser displacement sensor based on auto-collimation principle[J]. Journal of Applied Optics, 2023, 44(4): 720-725. DOI: 10.5768/JAO202344.0401003
Citation: ZHANG Xinting, WU Qianqian, KANG Lei. Optical system design of compact laser displacement sensor based on auto-collimation principle[J]. Journal of Applied Optics, 2023, 44(4): 720-725. DOI: 10.5768/JAO202344.0401003

基于自准直原理的紧凑型激光位移传感器光学系统设计

Optical system design of compact laser displacement sensor based on auto-collimation principle

  • 摘要: 分析传统直射式和斜射式激光位移传感器的特性,结合两者的优势,设计了一种基于自准直原理的紧凑型激光位移传感器。在结构上,利用直线结构取代了大三角的光路布局,形成自准直式光路结构。引入分光比50%的分束镜,与光轴成45°角放置,将会聚透镜和成像透镜合为一枚,并使聚光镜、分束镜和光电探测器共轴,简化了系统结构,减小了仪器体积,同时,推导了符合自准直原理的Scheimpflug条件。利用光学设计软件Zemax对光学系统进行仿真,系统采用单透镜的结构形式,前表面为Forbes非球面,入瞳直径 D=4\;\textmm ,视场角 \text2\omega =4^\circ,总长L = 20\;\textmm,成像质量和系统尺寸均达到最佳。该系统具有测量范围大、分辨力高、结构尺寸小、光能损失小等特点,通过实验与Keyence激光位移传感器比较,该系统能够保证测头分辨力1\;\textμm、综合检测精度 \pm \text2\;\textμm的技术指标。

     

    Abstract: The characteristics of traditional direct and oblique laser displacement sensor were analyzed. Combined with their advantages, a compact laser displacement sensor based on auto-collimation principle was designed. In the structure, the linear structure was used to replace the optical path layout of the large triangle, and the auto-collimation optical path structure was formed. A beam splitter with a splitting ratio of 50% was introduced and placed at an angle of 45° with the optical axis to combine the focusing lens and imaging lens into one, and made the condenser, beam splitter and photo-detector coaxial, which simplified the system structure and reduced the volume of the instrument. At the same time, the Scheimpflug condition conforming to the auto-collimation principle was derived. The optical design software Zemax was used to simulate the optical system. The system adopts the structure of single lens, the front surface is Forbes aspheric surface, the entrance pupil diameter D is 4 mm, the field angle 2 ω is 4°, the total length L is 20 mm, and the imaging quality and system size are the best. The system has the characteristics of large measurement range, high resolution, small structure size and small light energy loss. Compared with the experiments of Keyence laser displacement sensor, the system can ensure the technical indexes of probe resolution 1 μm and comprehensive detection accuracy ±2 μm.

     

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