基于方波相位调制的多波长位移干涉测量

Multi wavelength displacement interferometry based on square wave phase modulation

  • 摘要: 相位生成载波(phase generated carrier, PGC)技术是多波长光纤位移传感器(multi wavelength fiber displacement sensor, MWFDS)中的核心技术。提出一种基于方波信号相位调制和解调(square-wave phase modulation and demodulation, SWPMD)的方法,研究构建了相应的光路系统,精确控制方波信号对多波长光束进行相位调制,对采集到的干涉信号进行数字处理以实现相位解调,进而复现位移信息。仿真实验部分系统地分析了不同频率调制信号及方波调制信号初始相位变化对位移复现精度的影响,无论调制参数如何变化,位移复原的均方根误差(root-mean-square error, RMSE)均稳定保持在0.15 μm~0.3 μm范围内。通过应用SWPMD方法,对复杂的位移轨迹进行了复现,证明了该方法在提升MWFDS性能方面的普适性和有效性。最后,计算分析了对不同步长方波位移的复现情况,证明了所提方法在理论上能够实现0.1 nm位移测量的分辨率。

     

    Abstract: Phase generated carrier (PGC) technology is the core technology of multi-wavelength fiber displacement sensor (MWFDS). In this paper, a square-wave phase modulation and demodulation (SWPMD) method is proposed. A corresponding optical system has been established for research purposes, which precisely controls the phase modulation of multi-wavelength beams using square-wave signals. Digital processing is applied to the collected interference signals to achieve phase demodulation, thereby reconstructing displacement information. The simulation experiment systematically analyzes the impact of modulation signals with different frequencies and changes in the initial phase of square-wave modulation signals on the accuracy of displacement reconstruction. The root mean square (RMS) error of displacement reconstruction remains stable within the range of 0.15 to 0.3 μm regardless of the modulation parameters. By applying the SWPMD method to reproduce complex displacement trajectories, the universality and effectiveness of the SWPMD method in improving the performance of MWFDS have been demonstrated. Finally, the reproduction of square wave displacement with different step sizes was calculated and analyzed, proving that the method proposed in this paper can theoretically achieve a resolution of 0.1nm displacement measurement.

     

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