低相干光谱域干涉信号对比度变化规律研究

Theoretical analysis of the affecting factors on the contrast of broadband optical interference signals in frequency domain

  • 摘要: 为了研究低相干光谱域干涉信号位相及对比度调制规律,拓展低相干光谱域干涉法在精密测量领域应用,从双光束干涉出发,建立低相干光谱域干涉数理模型,分析测试面倾斜系数、光谱分辨率、光程差及表面反射率等关键系统参数对谱域干涉信号对比度及位相的调制作用。在此基础上,开展低相干光谱域干涉距离传感实验,采集干涉信号,研究不同实验参数对谱域干涉信号的调制规律。在测试表面反射率R=13.6%情况下,实验测量最大光程差为150 μm,测试面倾斜角度为0.0168°,依然可以保证谱域干涉信号能够有效解算,与理论分析预测结果一致。实验结果表明,构建的低相干光谱域干涉光强数理模型可以有效分析不同参数对干涉信号对比度的调制规律。

     

    Abstract: The signal contrast of broadband optical interferometry system is affected by many parameters. In order to accurately guide the parameter design of broadband optical interferometry system and predict the contrast degradation law of interference signal, a mathematical model of broadband optical interferometry was established in this paper from the perspective of two-beam interferometry. The modulation effects of key parameters such as spectral resolution, optical path difference, tilt coefficient of test surface and surface reflectivity on the contrast of interference signals in frequency domain were analyzed. On this basis, the correlation simulation and practical frequency domain interference distance sensing experiments were carried out. When the contrast of the interference signal was reduced below 0.1 and the interference signal in the frequency domain could be solved, the constructed frequency domain interferometry system could measure the surface reflectance R=13.6%, the maximum optical path difference could be measured as 150 μm, and the tilt angle of the test surface could reach 0.0168°. The results show that the mathematical model of interference intensity in broadband optical frequency domain can effectively analyze the modulation rule of different parameters on the interference signal contrast.

     

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