柱面绝对检测的子孔径加权拼接算法

Sub-aperture weighted stitching algorithm for absolute measurement of cylindrical surface

  • 摘要: 子孔径拼接干涉法要求相邻子孔径之间存在一定的重叠区域,通过去除相邻子孔径重叠区域中对应点的相位偏差,拼接得到完整的面形图。本文提出了一种加权融合拼接算法,通过计算重叠区域内各组测量结果的权重,改善了均化法在重叠区取值时产生的拼接痕迹,实现更平滑的拼接效果。同时,结合柱面两位置绝对测量法,消除了参考镜面形的影响,简化了柱面三位置干涉测量法中旋转被测镜的步骤,减少了子孔径调整过程中失调误差对测量结果的影响。在共聚焦位置和焦线位置获取了子孔径的测量数据,并在拼接后通过切比雪夫多项式拟合,得出柱面全口径的绝对面形。该方法不仅降低了柱面测量对参考镜口径和焦距的依赖,还确保了测量精度。

     

    Abstract: The sub-aperture stitching interferometry method requires a certain overlapping region between adjacent sub-apertures. By removing the phase deviations of corresponding points in the overlapping regions, a complete surface map was stitched together. A weighted fusion stitching algorithm was proposed. By calculating the weights of each group of measurement results in the overlapping area, the splicing traces produced when the averaging method taking values in the overlapping area were improved, achieving a smoother splicing effect. Additionally, by combining the cylindrical two-position absolute measurement method, the influence of the reference mirror surface shape was eliminated, simplifying the process for rotation in the cylindrical three-position interferometric measurement method. The influence of misalignment errors on measurement results during sub-aperture adjustment was also reduced. The measurement data of sub-aperture were obtained at the confocal and focal line positions, and after stitching, the Chebyshev polynomial fitting was applied to derive the absolute surface shape of the entire cylindrical aperture. This method not only reduces dependence of cylindrical measurement on the reference mirror aperture and focal length, but also ensures measurement accuracy.

     

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