非接触式微小缺陷检测系统设计

Design of non-contact micro defect detection system

  • 摘要: 在铝箔、金箔等制造过程中会有一定比例的不良品,典型的缺陷是微小空洞,并且该缺陷尺寸非常小,通常为μm级,不能通过人眼直接进行判断。该文提出一种窄带线光源和大视场接收系统的组合方案,可实现对大尺寸样品中存在的微小缺陷进行非接触检测。系统由激光光源、鲍威尔棱镜和非球面透镜构成,输出高准直、高均匀度、大尺寸的线性激光束;线阵探测器放置于聚焦透镜离焦平面,通过接收到的光斑位置可判断缺陷的具体位置;根据光强的强弱,可识别出缺陷孔径的大小,最终实现对缺陷的定位和分类。仿真结果表明:系统可实现对大尺寸产品以及μm级微小缺陷的检测,具备无接触、快速、精准的自动化检测能力,有效解决了人工检测微小缺陷时效率低、难度大、漏检率高、成本高等问题。

     

    Abstract: In the manufacturing process of aluminum foil, gold foil, etc., there will be a certain proportion of defective products. The typical defect is a tiny void, and the size of the defect is very small, usually at the μm level, which cannot be directly judged by the human eyes. A non-contact system device for detecting tiny defects by combining the highly collimated narrow-band line light source and a large field of view receiving optical system was proposed. The system consisted of the laser light source, a Powell prism, and an aspheric lens to output a highly-collimated, highly-uniform, and large-sized linear laser beam. The linear array detector was placed on the defocus plane of the focusing lens, and the specific location of the defect could be determined by the position of the received light spot. According to the intensity of the light, the size of the defect aperture could be identified, and finally the location and classification of the defect could be achieved. The system realized the detection of large-size products and μm-level tiny defects, and has non-contact, fast, and accurate automatic detection capabilities, which effectively solves the problems of low efficiency, high difficulty, high missed detection rate, and high cost when manually detecting tiny defects.

     

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