纳秒激光辐照彩色CCD探测器损伤实验研究

Experimental study of color CCD detector damage by nanosecond laser irradiation

  • 摘要: 随着光电技术的发展,彩色电荷耦合器件(CCD)探测器在各种应用中的重要性不断提升。因此,分析其在激光辐照下的损伤特性是提升其可靠性的关键。选用波长为532 nm,脉冲宽度为10 ns,重复频率为1 Hz的纳秒激光对彩色CCD探测器进行损伤实验研究,分析其在不同峰值功率密度下的损伤特性。通过金相显微镜、扫描电子显微镜和三维表面测量仪观察彩色CCD探测器损伤区域的微观结构和深度,从而确定内部损伤的位置。结果表明:在2.675×105 W/cm2功率密度下,损伤集中在分色滤色片层,出现白洞损伤,当功率密度增至3.534×106 W/cm2时,遮光铝膜熔化,引发白线损伤,进一步增加功率密度至4.526×106 W/cm2,损伤深入到N型光敏区,导致灰-白屏损伤,在最大功率密度5.926×106 W/cm2时,N型硅基底受损,彩色CCD探测器完全失效。

     

    Abstract: With the development of optoelectronic technology, the importance of color charge coupled device (CCD) detectors in various applications is continuously increasing. Therefore, analysis of damage properties under laser irradiation is key to enhancing their reliability. A nanosecond laser with a wavelength of 532 nm, a pulse width of 10 ns, and a repetition frequency of 1 Hz was used to experimentally study the color CCD detectors, and the damage properties were analyzed under varying peak power densities. The microstructure and depth of the damaged regions on the color CCD detectors were observed using metallographic microscopy, scanning electron microscopy (SEM), and a 3D surface profiler, thereby determining the internal damage locations. The results indicate at a power density of 2.675×105 W/cm2, the damage is mainly concentrated in the color separation filter layer, leading to the appearance of white spot damage. When the power density increases to 3.534×106 W/cm2, the aluminum light-shielding film melts, causing white line damage. Further increasing to 4.526×106 W/cm2, the damage penetrates into the N-type photosensitive region, leading to gray-white screen damage. At the maximum power density of 5.926×106 W/cm2, the N-type silicon substrate is damaged, causing the color CCD detector to completely fail.

     

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