中波红外亚波长单层增透膜金属线栅偏振器件设计

Design of mid-wave infrared metal wire-grid polarizer with sub-wavelength single-layer antireflection film

  • 摘要: 针对3\text μm\sim 5 \text μm中波红外波段,设计了一种硅(\textSi)基底上的金(\textAu)金属线栅偏振器件,提出了在\textAu线栅和\textSi基底间引入\textMg\textF_\text2介质层,以提高金属线栅的\textTM波透过率和偏振消光比\textER。利用\textCOMSOL仿真软件模拟优化\textSi基底上的\textAu金属线栅的相关结构参数,计算结果表明,\textTM波平均透过率为93%、平均偏振消光比为39.3 dB。同时,还提出了采用金属钨\left( \textW \right)作为新的金属材料来提高线栅偏振器偏振性能的方法,仿真结果表明,\textTM波平均透过率为92.7%、平均偏振消光比为64.4 dB。然而,金属钨的硬度较高,对蚀刻工艺要求更高,我们期待通过工艺和技术手段的进步,制作出性能优越的中波红外金属线栅偏振器件。

     

    Abstract: A Si-based gold (Au) wire-grid polarizer was designed for the 3 μm~5 μm mid-wave infrared (MWIR) wavelength range. The introduction of an MgF2 dielectric layer between the Au grid and the Si substrate was proposed to improve the transmittance of transverse magnetic (TM) waves and the extinction ratio (ER) of the wire-grid polarizer. The structural parameters of the Au grid on the Si substrate were optimized using COMSOL simulation software. The results show that the average transmittance of TM waves is 93%, and the average polarized ER is 39.3 dB. In addition, a method of using tungsten (W) as a new metal material to improve the polarization performance of the wire-grid polarizer was proposed. The simulation results show that the average transmittance of TM waves is 92.7%, and the average polarized ER is 64.4 dB. However, the W has higher hardness and higher requirements on the etching process. It is expected to make superior MWIR wire-grid polarizers through advances in process and technologies.

     

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