改进型双光路测量法检测角锥棱镜直角误差

Improved double-pass measurement method for detecting right-angle errors of corner cube prisms

  • 摘要: 传统的角锥棱镜二面角直角误差测量是基于斐索干涉系统使用单光程法对角锥进行直接测量,存在多次逆反射导致的系统像差以及调节参考镜倾斜引入的误差。采用一种改进型的双光程测法,可以匹配参考光和测试光的不规则性,进而消除系统像差的影响,且无需调整参考镜。实验使用斐索干涉仪,分别采用传统方法和改进型方法对同一角锥样品进行测量。单光程测量法得到二面角直角误差分别为0.978 5 μrad,1.536 8 μrad以及−0.355 8 μrad;双光程测量法得到二面角直角误差分别为0.638 3 μrad,1.260 9 μrad以及−0.311 3 μrad。实验结果验证了双光程测量法比单光程测量法更为准确。

     

    Abstract: The traditional method for measuring the right-angle error of a corner cube prism involves using the Fizeau interferometric system with a single-pass method. However, this method has some limitations, including the presence of systematic aberrations caused by multiple retro-reflections and errors introduced by adjusting the tilt of the reference mirror. An improved double-pass method was used to measure the right-angle error of a corner cube prism. This method could match the irregularities of the reference light and the test light, which eliminated the effect of systematic aberration and eliminated the need to adjust the reference mirror. Experiments were carried out using a Fizeau interferometer to measure the same corner cube prism using the traditional method and the improved method. Single-pass measurements result in dihedral angle errors of 0.978 5 μrad, 1.536 8 μrad, and −0.355 8 μrad, respectively. Double-pass measurements result in dihedral angle errors of 0.638 3 μrad, 1.260 9 μrad, and −0.311 3 μrad. The experimental results verify that the double-pass measurement method is more accurate than the single-pass measurement method.

     

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